Record #22056
Atomic simulation of deposition and etching on the surface of Si bombarded by energetic SiF3
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Aug 10, 2006
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School of Material Engineering, Southwest University, Chongqing 400715, People's Republic of China · School of Information Engineering, Guizhou University (Huaxi), 550025 Guizhou, People's Republic of China · School of Information Engineering(Cai Jiaguan), 550025, University of Guizhou, Guizhou Province, People's Republic of China
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