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Record #24583

Photolytic deposition of tungsten hexacarbonyl: CVD of W-based films with the assistant of UV beam in ultra-high vacuum condition

Changyong Xiao, Boping Liu, Xuelian He

Journal

Materials Research Express

Publisher

Original paper date

Jun 5, 2019

Original DOI

10.1088/2053-1591/ab24fc

Country

Institution

Shanghai Key Laboratory of Multiphase Material Chemical Engineering, East China University of Science and Technology, Shanghai 200237, People's Republic of China · College of Materials and Energy, South China Agricultural University, Guangzhou 510642, People's Republic of China

Open access

No

Article type

Research Article

Broad categories

(PHY) Chemistry (PHY) Physics

Citation lifecycle

How this paper is being cited

Pre-retraction

1

Same day

0

Post-retraction

0

% post-retraction

0.0%

~0.7 citations/yr before retraction · ~0.0 citations/yr after

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