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Record #30050

Study of electrical and micro-structural properties of nano-scale ultra thin gate dielectric stacks in a MOS Device using Pulse Laser Deposition technique

A Srivastava, R K Nahar, V Gupta, C K Sarkar

Journal

2011 11th IEEE International Conference on Nanotechnology

Publisher

IEEE: Institute of Electrical and Electronics Engineers

Original paper date

Aug 15, 2011

Original DOI

10.1109/NANO.2011.6144545

Country

Institution

Electronics and Communication Engineering, Indian Institute for Information Technology-Design and Manufacturing, Jabalpur, India · Sensors and Nanotechnology Group, Central Electronics Engineering Research Institute, Pilani, Rajasthan, India · Department of Physics and Astrophysics, University of Delhi, New Delhi, India · Department of Electronics & Telecommunication Engineering, Jadavpur University, Kolkata, India

Open access

No

Article type

Conference Abstract/Paper

Broad categories

Citation lifecycle

How this paper is being cited

Pre-retraction

0

Same day

0

Post-retraction

1

% post-retraction

100.0%

~0.0 citations/yr before retraction · ~0.1 citations/yr after

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